A microcalorimeter is a chemical sensor where the heat of chemical reaction is detected by a thermal sensor structure and an element for measuring effects associated with temperature gradients or temperature differences. Silicon-based sensors have usually a thermal structure consisting of a silicon chip in which a low heat capacity and low mass thin membrane has been fabricated using various kind of etching techniques. Then a catalytic thin film is deposited on top of the membrane. The heat of reaction rises the temperature of the membrane and this effect can be measured directly or indirectly by measuring variations of mechanical or electrical parameters directly related to the temperature change.
Progress towards development of differential electromechanical micro-calorimeter
V Foglietti;A Bearzotti;G Padeletti;
1996
Abstract
A microcalorimeter is a chemical sensor where the heat of chemical reaction is detected by a thermal sensor structure and an element for measuring effects associated with temperature gradients or temperature differences. Silicon-based sensors have usually a thermal structure consisting of a silicon chip in which a low heat capacity and low mass thin membrane has been fabricated using various kind of etching techniques. Then a catalytic thin film is deposited on top of the membrane. The heat of reaction rises the temperature of the membrane and this effect can be measured directly or indirectly by measuring variations of mechanical or electrical parameters directly related to the temperature change.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
