[object Object] Brillouin light scattering has been used for studying the propagation of the surface Rayleigh mode in AIN films grown by R.F. reactive diode magnetron sputtering on (1-1 1)-Si substrate. Since the velocity of the shear vertical wave in the film is higher than that in the substrate, the structure is of the type. fast film / slow substrate. The evolution of the Rayleigh wave has been analyzed experimentally on films of different thickness between 20 nm and 1.2 pm. The Rayleigh mode exist up to a cutoff value of the ratio h/?. For higher values of this parameter this wave becomes a leaky mode radiating energy into the substrate. Measurement of its phase velocity enabled us to determine the value of the effective elastic constant c44 of the film.
Rayleigh acoustic mode in aluminum nitride films
Verona E
1994
Abstract
[object Object] Brillouin light scattering has been used for studying the propagation of the surface Rayleigh mode in AIN films grown by R.F. reactive diode magnetron sputtering on (1-1 1)-Si substrate. Since the velocity of the shear vertical wave in the film is higher than that in the substrate, the structure is of the type. fast film / slow substrate. The evolution of the Rayleigh wave has been analyzed experimentally on films of different thickness between 20 nm and 1.2 pm. The Rayleigh mode exist up to a cutoff value of the ratio h/?. For higher values of this parameter this wave becomes a leaky mode radiating energy into the substrate. Measurement of its phase velocity enabled us to determine the value of the effective elastic constant c44 of the film.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
