A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction.
Integrated array of gas sensors
Verona E;
1998
Abstract
A new surface acoustic wave multi-channel sensor array suitable for pattern recognition purposes has been implemented and tested on an ST-cut quartz substrate using one single palladium sorbent film for all the channels. The different response of each channel towards the same gas components is provided by the dependence of the mechanical displacement components of the acoustic wave on the propagation direction.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
