Polycrystalline 3C(,8)-SiC thin films have been deposited on oxidized Si by low pressure chemical vapor deposition (LPCVD) to obtain bi-layer structures [Si(100)/SiO2/poly 3C-SiC].
Characterization of cubic 3C(beta)-SiC samples for pressure sensors and micro-electromechanical system (MEMS) applications is reported in this paper.
Characterization of polycrystalline 3C(beta)-SiC thin films for MEMS and pressure sensors application
Cocuzza M;
2004
Abstract
Characterization of cubic 3C(beta)-SiC samples for pressure sensors and micro-electromechanical system (MEMS) applications is reported in this paper.File in questo prodotto:
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