Pd:Ni films in surface acoustic wave (SAW) sensors were studied. The test structures were normal SAW lines with input and output electromechanical transducers of the interdigital type and Pd:Ni films between them. The substrates of the structures were made of AT-, ST- and YX-cut plates of 1 × 10 × 30 mm. This article discusses the results obtained from this study.
Fast acting hydrogen detectors using surface acoustic waves
Verona E
1998
Abstract
Pd:Ni films in surface acoustic wave (SAW) sensors were studied. The test structures were normal SAW lines with input and output electromechanical transducers of the interdigital type and Pd:Ni films between them. The substrates of the structures were made of AT-, ST- and YX-cut plates of 1 × 10 × 30 mm. This article discusses the results obtained from this study.File in questo prodotto:
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