ZnO piezoelectric thin films have been sputtered on fused quartz and 7059 Corning glass by means of a conventional r.f. diode sputtering for integrated acousto-optic applications. The structures of the films have been analized by X-ray diffraction and scanning electron microscope. The good quality of the ZnO films allowed the realization of SAW transducers on planar optical wave guides.
Zinc-oxide piezoelectric films for integrated acousto-optics
E Verona;S Lagomarsino
1982
Abstract
ZnO piezoelectric thin films have been sputtered on fused quartz and 7059 Corning glass by means of a conventional r.f. diode sputtering for integrated acousto-optic applications. The structures of the films have been analized by X-ray diffraction and scanning electron microscope. The good quality of the ZnO films allowed the realization of SAW transducers on planar optical wave guides.File in questo prodotto:
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