ZnO piezoelectric thin films for integrated acousto-optic applications have been deposited on fused quartz and 7059 Corning glass by means of a conventional r. f. diode sputtering. The structures of the films have been analyzed by X-ray diffraction and scanning electron microscope. The good quality of the ZnO films allowed the realization of SAW transducers and planar optical waveguides.
ZINC-OXIDE PIEZOELECTRIC FILMS FOR INTEGRATED ACOUSTO-OPTICS.
Verona Enrico;Lagomarsino Stefano
1983
Abstract
ZnO piezoelectric thin films for integrated acousto-optic applications have been deposited on fused quartz and 7059 Corning glass by means of a conventional r. f. diode sputtering. The structures of the films have been analyzed by X-ray diffraction and scanning electron microscope. The good quality of the ZnO films allowed the realization of SAW transducers and planar optical waveguides.File in questo prodotto:
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