A variety of numerical tools can be used to compensate for unwanted aberrations in acquired digitized holograms and improve the precision of metrology measurements.
Characterizing microelectromechanical systems with digital holography
Vito Pagliarulo;Pietro Ferraro
2016
Abstract
A variety of numerical tools can be used to compensate for unwanted aberrations in acquired digitized holograms and improve the precision of metrology measurements.File in questo prodotto:
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