The paper describes the region between a Maxwellian plasma source and a floating surface by a 1D-3V fully kinetic, electrostatic particle simulation. The electric field is self-consistently computed from the Poisson equation. The secondary electron emission is modelled by considering an expression for the secondary emission coefficient dependent on the primary electron energy and surface materials and a realistic secondary electron distribution function is introduced at the collector surface. The model is able to simulate the space-charge-limited conditions as well as the positively charged wall cases.

Effects of secondary electron emission from a floating surface on the plasma sheath

F Taccogna;S Longo;
2004

Abstract

The paper describes the region between a Maxwellian plasma source and a floating surface by a 1D-3V fully kinetic, electrostatic particle simulation. The electric field is self-consistently computed from the Poisson equation. The secondary electron emission is modelled by considering an expression for the secondary emission coefficient dependent on the primary electron energy and surface materials and a realistic secondary electron distribution function is introduced at the collector surface. The model is able to simulate the space-charge-limited conditions as well as the positively charged wall cases.
2004
Istituto di Nanotecnologia - NANOTEC
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/33555
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