This article presents a particle-in-cell (PIC)/test-particle Monte Carlo (TPMC) simulation of the dynamics of Ar+ ions in the region (sheath and presheath) surrounding an attracting cylindrical Langmuir probe at medium He buffer gas pressure. The numerical model is based on a combination of PIC simulation for the ion component and fluid description for the electrons using the Boltzmann relation. The electric field is self-consistently computed via the Poisson equation. The neutrals are modeled directly by an analytical method. The elastic collisions between Ar+ ions and He atoms are accounted for using a TPMC method based on the polarization potential theory. The results of the present simulation are compared with measurements, with other probe theories and the results of other authors simulations.

A Particle-in-Cell/Monte Carlo Model of the Ar+ Ion Collection in He Gas by a Cylindrical langmuir Probe in the Transition Regime

F Taccogna;S Longo;M Capitelli
2003

Abstract

This article presents a particle-in-cell (PIC)/test-particle Monte Carlo (TPMC) simulation of the dynamics of Ar+ ions in the region (sheath and presheath) surrounding an attracting cylindrical Langmuir probe at medium He buffer gas pressure. The numerical model is based on a combination of PIC simulation for the ion component and fluid description for the electrons using the Boltzmann relation. The electric field is self-consistently computed via the Poisson equation. The neutrals are modeled directly by an analytical method. The elastic collisions between Ar+ ions and He atoms are accounted for using a TPMC method based on the polarization potential theory. The results of the present simulation are compared with measurements, with other probe theories and the results of other authors simulations.
2003
Istituto di Nanotecnologia - NANOTEC
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/34484
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