Non-equilibrium vibrational and electron energy distribution functions in mtorr, high-electron-density nitrogen discharges and afterglows

Non-equilibrium vibrational distributions (vdf) and non-equilibrium electron energy distribution functions (eedf) in a nitrogen plasma at low pressure (mtorr) have been calculated by using a time-dependent plasma physics model coupled to the Boltzmann equation and heavy particle kinetics. Different case studies have been selected showing the non-equilibrium character of both vdf and eedf under discharge and post-discharge conditions in the presence of large concentrations of electrons. Particular attention is devoted to the electron-molecule resonant vibrational excitation cross sections acting in the whole vibrational ladder. The results in the post-discharge conditions show the interplay of superelastic vibrational and electronic collisions in forming structures in the eedf. The link between the present results in the mtorr afterglow regime with the existing eedf in the torr and atmospheric regimes is discussed.