We report the fabrication process of capacitive ultrasonic transducers by surface micromachining techniques. In particular, we investigated the deposition step of the structural layer for the membranes. The final device was tested by impedance analysis.
Fabrication and characterization of micromechanical ultrasonic transducers
Notargiacomo A;
2000
Abstract
We report the fabrication process of capacitive ultrasonic transducers by surface micromachining techniques. In particular, we investigated the deposition step of the structural layer for the membranes. The final device was tested by impedance analysis.File in questo prodotto:
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