Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films, Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process.
Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step
Grenci Gianluca;
2009
Abstract
Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films, Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process.File in questo prodotto:
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