Thermal properties of phase change chalcogenide alloys involved in the phase change memory devices are measured using experimental techniques suitable with the observation scale. The modulated photothermal radiometry, the time resolved pump-probe thermoreflectance and the scanning thermal microscopy are used in a general inverse approach. This note aims to describe the work we have done during the ten last years in terms of experimental techniques and comparison with theoretical models.

THERMAL PROPERTIES MEASUREMENTS OF PHASE-CHANGE ALLOYS WITHIN THE CONFIGURATION OF NANOSTRUCTURES AND DEVICES

C Wiemer;R Fallica;M Longo;
2018

Abstract

Thermal properties of phase change chalcogenide alloys involved in the phase change memory devices are measured using experimental techniques suitable with the observation scale. The modulated photothermal radiometry, the time resolved pump-probe thermoreflectance and the scanning thermal microscopy are used in a general inverse approach. This note aims to describe the work we have done during the ten last years in terms of experimental techniques and comparison with theoretical models.
2018
Istituto per la Microelettronica e Microsistemi - IMM
phase-change alloys
memory devices
thermal properties
conduction
microscale
inverse methods
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/363597
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