This paper deals with the quadrupole mass spectrometric evaluation of fluoro-compd. emissions during plasma processing. A crit. discussion of the anal. procedure including the estn. of quantification limits, detection limits, and t-Student test, is reported. The use of pos. and neg. chem. ionization as the ionization source to reduce the interference due to peak overlapping is also examd.
On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing
Fracassi F;D'Agostino R;
2002
Abstract
This paper deals with the quadrupole mass spectrometric evaluation of fluoro-compd. emissions during plasma processing. A crit. discussion of the anal. procedure including the estn. of quantification limits, detection limits, and t-Student test, is reported. The use of pos. and neg. chem. ionization as the ionization source to reduce the interference due to peak overlapping is also examd.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
