In this work, we report on our last results concerning the polyethyleneterephthalate barrier performance optimization as a function of the chem. of the SiOx coating, deposited by means of hexamethyldisiloxane/oxygen-fed plasmas ignited in an RF capacitively coupled parallel plates reactor. The influence of the gas fed compn. and power on the plasma phase/coating chem, and on the O2 gas transmission rate has been investigated. The plasma phase has been studied by means of Fourier transform IR absorption (FTIR) and optical emission spectroscopies (OES), and the results have been coupled to he film chem, investigated by means of FTIR spectroscopy. These techniques show excellent potentialities in the correlation of the plasma phase and film chemistries with the barrier properties of the SiOx-coated polymer, esp. when a very good barrier level is required.
Diagnostics and insights on PECVD for gas-barrier coatings
2002
Abstract
In this work, we report on our last results concerning the polyethyleneterephthalate barrier performance optimization as a function of the chem. of the SiOx coating, deposited by means of hexamethyldisiloxane/oxygen-fed plasmas ignited in an RF capacitively coupled parallel plates reactor. The influence of the gas fed compn. and power on the plasma phase/coating chem, and on the O2 gas transmission rate has been investigated. The plasma phase has been studied by means of Fourier transform IR absorption (FTIR) and optical emission spectroscopies (OES), and the results have been coupled to he film chem, investigated by means of FTIR spectroscopy. These techniques show excellent potentialities in the correlation of the plasma phase and film chemistries with the barrier properties of the SiOx-coated polymer, esp. when a very good barrier level is required.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
