Optical elements working at 121.6nm make use of Al and MgF2. We analyzed mono- and bi-layers of these materials, deposited by e-beam evaporation, and discussed how substrate temperatures and annealing affect their performances.
Efficiency of VUV Optical Materials According to Variations in Deposition Conditions
A J Corso;P Zuppella;M G Pelizzo
2015
Abstract
Optical elements working at 121.6nm make use of Al and MgF2. We analyzed mono- and bi-layers of these materials, deposited by e-beam evaporation, and discussed how substrate temperatures and annealing affect their performances.File in questo prodotto:
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