In this work two alternative approaches are introduced for automatically integrating large numbers of several ?ms long Si NWs in lateral thermoelectric devices. Both cases being planar require a thermally isolated platform to be defined by silicon micromachining. This opens the path to all-silicon thermal harvesters, which can be built in large volumes offering a cost-effective energy harvesting solution where thermal gradients are present.
Smart integration of Si NWs arrays in all-silicon thermoelectric micronanogenerators
Roncaglia Alberto;Belsito Luca;
2016-01-01
Abstract
In this work two alternative approaches are introduced for automatically integrating large numbers of several ?ms long Si NWs in lateral thermoelectric devices. Both cases being planar require a thermally isolated platform to be defined by silicon micromachining. This opens the path to all-silicon thermal harvesters, which can be built in large volumes offering a cost-effective energy harvesting solution where thermal gradients are present.File in questo prodotto:
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