MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1-xSrxMnO3, with x ? 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors. Keywords:
Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications
Pellegrino;Luca;Manca;Nicola;Bernini;Cristina;Daniele
2017
Abstract
MicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1-xSrxMnO3, with x ? 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors. Keywords:File in questo prodotto:
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