DC-Pulsed Magnetron Sputtering (PMS) allows to produce heteroepitaxial p-type Germanium thin films on 6 Silicon wafers. Integrated p-n photodiodes, based on DC-PMS deposited Ge/Si heterojunctions, feature flat responsivity over the whole third communication window.
Sputtered Ge-Si heteroepitaxial thin films for photodetection in third window
Pietralunga S M;Zappettini A;
2008
Abstract
DC-Pulsed Magnetron Sputtering (PMS) allows to produce heteroepitaxial p-type Germanium thin films on 6 Silicon wafers. Integrated p-n photodiodes, based on DC-PMS deposited Ge/Si heterojunctions, feature flat responsivity over the whole third communication window.File in questo prodotto:
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