This paper shows a thermal sensor capable of detecting the component of the acoustic particle velocity along one axis. The main novelty with respect to previous work is the use of a commercially available post-CMOS micromachining process for the whole fabrication flow, demonstrating the feasibility of a low-cost device. Another novel aspect of this work is the use of a simulation approach allowing effective optimization of the sensing structure layouts. The frequency response and directivity of the sensors have been measured and the results are discussed.

DESIGN AND CHARACTERIZATION OF ACOUSTIC PARTICLE VELOCITY SENSORS FABRICATED WITH A COMMERCIAL POST-CMOS MEMS PROCESS

Piotto Massimo;Stanzial Domenico;
2019

Abstract

This paper shows a thermal sensor capable of detecting the component of the acoustic particle velocity along one axis. The main novelty with respect to previous work is the use of a commercially available post-CMOS micromachining process for the whole fabrication flow, demonstrating the feasibility of a low-cost device. Another novel aspect of this work is the use of a simulation approach allowing effective optimization of the sensing structure layouts. The frequency response and directivity of the sensors have been measured and the results are discussed.
2019
Istituto per la Microelettronica e Microsistemi - IMM
Acoustic Particle Velocity Sensor
MEMS
CMOS
compatible
Directivity
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/412055
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