Au-catalyzed self-assembly of GaAs nanowires on (111)B GaAs by metalorganic vapor phase epitaxy is reported between 375 and 500 degrees C, using tertiarybutylarsine and trimethylgallium in H-2. The nanowires are [111]B aligned and kink-free. Below 425 degrees C the nanowires have narrow base diameter distributions, closely matching the size (similar to 60 nm) of the Au nanoparticles at their tip (no tapering). Above 425 degrees C the nanowires show a hexagonal-based pyramidal shape with base edges normal to the < 211 > in-plane substrate directions and base diameters which increase exponentially with temperature, indicating a kinetics limited growth along the nanowire sidewalls. Activation energies in the range of similar to 20-23 kcal/mol were estimated for growth along both the sidewalls and the B direction.

Size and shape control of GaAs nanowires grown by metalorganic vapor phase epitaxy using tertiarybutylarsine

Prete P;
2006

Abstract

Au-catalyzed self-assembly of GaAs nanowires on (111)B GaAs by metalorganic vapor phase epitaxy is reported between 375 and 500 degrees C, using tertiarybutylarsine and trimethylgallium in H-2. The nanowires are [111]B aligned and kink-free. Below 425 degrees C the nanowires have narrow base diameter distributions, closely matching the size (similar to 60 nm) of the Au nanoparticles at their tip (no tapering). Above 425 degrees C the nanowires show a hexagonal-based pyramidal shape with base edges normal to the < 211 > in-plane substrate directions and base diameters which increase exponentially with temperature, indicating a kinetics limited growth along the nanowire sidewalls. Activation energies in the range of similar to 20-23 kcal/mol were estimated for growth along both the sidewalls and the B direction.
2006
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/41785
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