The goal of the study was to identify the environmental hotspots of a lab scale experimental campaign of AlTiN based magnetron sputtering thin film deposition onto laminated steel. Results highlighted that the main impacts were related to the electricity consumed in instruments operations. Several optimization strategies were evaluated to reduce the overall impacts, and to improve the environmental profile of the lab activity.
Life cycle assessment of AlTiN thin films deposited by magnetron sputtering
Battiston S;Fiameni S;Barison S;Armelao L
2021
Abstract
The goal of the study was to identify the environmental hotspots of a lab scale experimental campaign of AlTiN based magnetron sputtering thin film deposition onto laminated steel. Results highlighted that the main impacts were related to the electricity consumed in instruments operations. Several optimization strategies were evaluated to reduce the overall impacts, and to improve the environmental profile of the lab activity.File in questo prodotto:
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prod_442849-doc_178158.pdf
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Descrizione: Life cycle assessment of AlTiN thin films deposited by magnetron sputtering
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