Sol-gel derived In2O3 thin and thick films were investigated as gas sensors for the detection of very low concentration of CO and NO2. A marked selectivity towards oxidizing and reducing gases was achieved by properly selecting the active materials from the same starting solution. A morphological and structural characterization of the films allowed to understand their different electrical behavior.

Tuning of the gas sensing properties of self-assembled In2O3 nanoboxes prepared by sol-gel techniques

A Taurino;M Catalano;P Siciliano;
2003

Abstract

Sol-gel derived In2O3 thin and thick films were investigated as gas sensors for the detection of very low concentration of CO and NO2. A marked selectivity towards oxidizing and reducing gases was achieved by properly selecting the active materials from the same starting solution. A morphological and structural characterization of the films allowed to understand their different electrical behavior.
2003
Istituto per la Microelettronica e Microsistemi - IMM
981-238-747-1
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/434177
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