A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of +/- 50 mu T with a sensitivity of 0.45 mV/mu T.
Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem
Melissano E;Siciliano P;
2006
Abstract
A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of +/- 50 mu T with a sensitivity of 0.45 mV/mu T.File in questo prodotto:
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