Zinc phthalocyanine (ZnPc) thin films have been deposited by glow discharge-induced sublimation (GDS). This physical technique allows to produce very high porosity films, whose response to gases is much higher with respect to evaporated films. The structural and morphological properties of ZnPc films have been studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), nitrogen physisorption measurements and grazing incidence X-ray diffraction (GIXRD). Gas sensing properties of the deposited films have been tested by measuring the optical absorption changes upon exposure to atmospheres containing volatile organic compounds (VOCs).

Optical response of plasma-deposited zinc phthalocyanine films to volatile organic compounds

Manera MG;Rella R;Siciliano P;
2007

Abstract

Zinc phthalocyanine (ZnPc) thin films have been deposited by glow discharge-induced sublimation (GDS). This physical technique allows to produce very high porosity films, whose response to gases is much higher with respect to evaporated films. The structural and morphological properties of ZnPc films have been studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), nitrogen physisorption measurements and grazing incidence X-ray diffraction (GIXRD). Gas sensing properties of the deposited films have been tested by measuring the optical absorption changes upon exposure to atmospheres containing volatile organic compounds (VOCs).
2007
Istituto per la Microelettronica e Microsistemi - IMM
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/45499
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? 17
social impact