Zinc phthalocyanine (ZnPc) thin films have been deposited by glow discharge-induced sublimation (GDS). This physical technique allows to produce very high porosity films, whose response to gases is much higher with respect to evaporated films. The structural and morphological properties of ZnPc films have been studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), nitrogen physisorption measurements and grazing incidence X-ray diffraction (GIXRD). Gas sensing properties of the deposited films have been tested by measuring the optical absorption changes upon exposure to atmospheres containing volatile organic compounds (VOCs).

Optical response of plasma-deposited zinc phthalocyanine films to volatile organic compounds

Manera MG;Rella R;Siciliano P;
2007

Abstract

Zinc phthalocyanine (ZnPc) thin films have been deposited by glow discharge-induced sublimation (GDS). This physical technique allows to produce very high porosity films, whose response to gases is much higher with respect to evaporated films. The structural and morphological properties of ZnPc films have been studied by scanning electron microscopy (SEM), atomic force microscopy (AFM), nitrogen physisorption measurements and grazing incidence X-ray diffraction (GIXRD). Gas sensing properties of the deposited films have been tested by measuring the optical absorption changes upon exposure to atmospheres containing volatile organic compounds (VOCs).
2007
Istituto per la Microelettronica e Microsistemi - IMM
Inglese
127
150
156
http://ac.els-cdn.com/S0925400507004790/1-s2.0-S0925400507004790-main.pdf?_tid=285791643218400ba86a4500cbb72482&acdnat=1335434284_8fb012e0899b5c49a75ce84fc02c781c
12
info:eu-repo/semantics/article
262
Maggioni, G; Manera, Mg; Spadavecchia, J; Tonezzer, M; Carturan, S; Quaranta, A; Fernandez, Cdj; Rella, R; Siciliano, P; Della Mea, G; Vasanelli, L; M...espandi
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/45499
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