The basic principle and the results of the feasibility study of a Bragg lattice parameter comparator, developed within the framework of the Standards, Measurements, and Testing European Project silicon for mass unit and standard (SIMUS) are described. It combines a Bragg lattice comparator (Wart-Hauser-mann design) and an X-ray angle interferometer to determine the angular position of diffraction peaks. Comparisons between Si crystals with a relative uncertainty of 1E-8 are expected.

A Bragg silicon lattice comparator

Servidori M;
2001

Abstract

The basic principle and the results of the feasibility study of a Bragg lattice parameter comparator, developed within the framework of the Standards, Measurements, and Testing European Project silicon for mass unit and standard (SIMUS) are described. It combines a Bragg lattice comparator (Wart-Hauser-mann design) and an X-ray angle interferometer to determine the angular position of diffraction peaks. Comparisons between Si crystals with a relative uncertainty of 1E-8 are expected.
2001
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/45521
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