Silver nanoparticles (10-20 nm) embedded into silica thin films have been obtained through the use of a silver organometallic precursor compound dissolved in Spin-On-Glass and subsequently spinned onto suitable substrates. In this paper we present a study of the shape, size, and distribution of silver particles through the use of microscopes, x-ray diffraction, and optical extinction. It has been observed that the obtained films are stable for annealing up to 500 degreesC with a progressive degradation above this temperature. Furthermore it is possible to obtain high-density silver particles up to 15% in weight without affecting the cluster size and shape.

Formation and characterization of high-density silver nanoparticles embedded in silica thin films by

2001

Abstract

Silver nanoparticles (10-20 nm) embedded into silica thin films have been obtained through the use of a silver organometallic precursor compound dissolved in Spin-On-Glass and subsequently spinned onto suitable substrates. In this paper we present a study of the shape, size, and distribution of silver particles through the use of microscopes, x-ray diffraction, and optical extinction. It has been observed that the obtained films are stable for annealing up to 500 degreesC with a progressive degradation above this temperature. Furthermore it is possible to obtain high-density silver particles up to 15% in weight without affecting the cluster size and shape.
2001
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/45544
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