By means of focused ion beam milling, we fabricate Hall magnetometers with active areas as small as 100 x 100nm(2). The constituent material can either be metallic (Au), semimetallic (Bi) or doped bulk semiconducting (Si doped GaAs). We experimentally show that Au nano-probes can work from room temperature down to liquid helium with magnetic flux sensitivity < 10(-1) Phi(0). (C) 2006 Elsevier B. V. All rights reserved.
Focused ion beam patterned Hall nano-sensors
Candini A;di Bona A;Affronte M;Ercolani D;Biasiol G;Sorba L
2007
Abstract
By means of focused ion beam milling, we fabricate Hall magnetometers with active areas as small as 100 x 100nm(2). The constituent material can either be metallic (Au), semimetallic (Bi) or doped bulk semiconducting (Si doped GaAs). We experimentally show that Au nano-probes can work from room temperature down to liquid helium with magnetic flux sensitivity < 10(-1) Phi(0). (C) 2006 Elsevier B. V. All rights reserved.File in questo prodotto:
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