The International Atomic Energy Agency has sponsored a formal intercomparison exercise for the seven depth profiling ion beam analysis codes, which are: GISA, RUMP, RBX, DEPTH, DataFurnace, SIMNRA and MCERD. This intercomparison is published in Nucl. Instr. and Meth. B [N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kotai, G. Lulli, M. Mayer, E. Rauhala, E. Szilagyi, M. Thompson, Nucl. Instr. and Meth. B 262 (2007) 281-303] and summarised here. The codes implement all known physical effects and they are all evaluated. We demonstrate that there is agreement between codes often better than 0.1%; and also detailed agreement with real spectra, showing in particular that the SRIM 2003 stopping powers for Si are correct to 0.6% for 1.5 MeV He. For the case of heavy ion elastic recoil detection (HI-ERD) the single scattering codes performed poorly for scattered particles, although recoiled particles were calculated correctly. (C) 2007 Elsevier B.V. All rights reserved.

Summary of IAEA intercomparison of IBA software

Bianconi M;Lulli G;
2008

Abstract

The International Atomic Energy Agency has sponsored a formal intercomparison exercise for the seven depth profiling ion beam analysis codes, which are: GISA, RUMP, RBX, DEPTH, DataFurnace, SIMNRA and MCERD. This intercomparison is published in Nucl. Instr. and Meth. B [N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kotai, G. Lulli, M. Mayer, E. Rauhala, E. Szilagyi, M. Thompson, Nucl. Instr. and Meth. B 262 (2007) 281-303] and summarised here. The codes implement all known physical effects and they are all evaluated. We demonstrate that there is agreement between codes often better than 0.1%; and also detailed agreement with real spectra, showing in particular that the SRIM 2003 stopping powers for Si are correct to 0.6% for 1.5 MeV He. For the case of heavy ion elastic recoil detection (HI-ERD) the single scattering codes performed poorly for scattered particles, although recoiled particles were calculated correctly. (C) 2007 Elsevier B.V. All rights reserved.
2008
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/46436
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