We present an effective technique to characterize silicon waveguide geometry by using Mach-Zehnder interferometers. The technique can independently estimate SOI thickness and waveguide width from the analysis of two simple interferometers. The results agree with standard metrology using ellipsometry and SEM microscopy, and allows the characterization of proximity effects too.
Silicon waveguide metrology through interferometry
Bontempi F.;
2016
Abstract
We present an effective technique to characterize silicon waveguide geometry by using Mach-Zehnder interferometers. The technique can independently estimate SOI thickness and waveguide width from the analysis of two simple interferometers. The results agree with standard metrology using ellipsometry and SEM microscopy, and allows the characterization of proximity effects too.File in questo prodotto:
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