Periodic multilayer for X-ray spectroscopy in the li K range

X-ray spectroscopy of lithium is very difficult, even impossible, with wavelength dispersive spectrometers commonly deployed on scanning electron microscopes or electron microprobe analyz-ers. This is due to the absence of crystals and lack of efficient periodic multilayer for this spectral range, around 50 eV. To address this issue, we propose using a Be/Si/Al multilayer having a period of about 29 nm. The multilayer was deposited by magnetron sputtering and its reflectivity measured as a function of the glancing angle in the spectral range of the Li K emission and as a function of the incident energy up to ~200 eV. This characterization demonstrates that the designed multilayer is suitable to efficiently perform spectroscopy in the range of the Li K emission in terms of reflectance (0.32 at 51.5 eV), bandwidth (around 3.5 eV) and rejection of high order diffracted radiation.