A compact anemometer based on integrated flow sensors is presented. The device exploits a recently proposed approach, by which the pressure induced on the lateral surface of a cylinder exposed to the wind is converted into two air flow rates exhibiting sinusoidal dependence on the wind direction. A significant size reduction and assemblage simplification were achieved by sensing the two flows by means of a double channel flow meter, integrated on a single silicon chip. The results of measurements, performed over a wind velocity range 0.4-7.9 m/s, demonstrated the effectiveness of the proposed anemometer.

Fabrication and characterization of a directional anemometer based on a single chip MEMS flow sensor

M Piotto;
2011

Abstract

A compact anemometer based on integrated flow sensors is presented. The device exploits a recently proposed approach, by which the pressure induced on the lateral surface of a cylinder exposed to the wind is converted into two air flow rates exhibiting sinusoidal dependence on the wind direction. A significant size reduction and assemblage simplification were achieved by sensing the two flows by means of a double channel flow meter, integrated on a single silicon chip. The results of measurements, performed over a wind velocity range 0.4-7.9 m/s, demonstrated the effectiveness of the proposed anemometer.
2011
Istituto di Elettronica e di Ingegneria dell'Informazione e delle Telecomunicazioni - IEIIT
Wind sensor
MEMS
Thermal flow sensor
Micromachining
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/50168
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