We report on the application of digital holographic microscopy for the investigation and the micro-topography reconstruction of different microstructures realized in bulk lithium niobate by differential etching of reversed ferroelectric domain patterns. These structures have a range of applications in optical ridge waveguides, alignment structures, V-grooves, micro-tips and micro-cantilever beams. Precise control of the surface quality and topography is required. The technique allows to digitally obtain a high-fidelity surface topography description of the specimen with only one image acquisition allowing to have relatively simple and compact set-ups able to give quantitative information on objects ' morphology. The advantages of this technique, compared to the traditional microscopy, are discussed.
Two-dimensional characterization of relief microstructures in lithium niobate through digital holographic microscopy
De Nicola S.
Methodology
;Grilli S.Writing – Original Draft Preparation
;Sansone L.Data Curation
;
2004
Abstract
We report on the application of digital holographic microscopy for the investigation and the micro-topography reconstruction of different microstructures realized in bulk lithium niobate by differential etching of reversed ferroelectric domain patterns. These structures have a range of applications in optical ridge waveguides, alignment structures, V-grooves, micro-tips and micro-cantilever beams. Precise control of the surface quality and topography is required. The technique allows to digitally obtain a high-fidelity surface topography description of the specimen with only one image acquisition allowing to have relatively simple and compact set-ups able to give quantitative information on objects ' morphology. The advantages of this technique, compared to the traditional microscopy, are discussed.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
