Additive Manufacturing Electronics (AME) is a promising method that has the potential to directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into conventional electronic circuits and boards. It enables fast customized prototyping, three-dimensional circuit boards, and small-series production. In this study, annular probes composed of circular suspended Aluminum Nitride (AlN)-based PMUT membranes, addressed in 2-dimensional arrays, were designed, fabricated, and encapsulated using AME technology.

Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes

Todaro, Maria Teresa;
2024

Abstract

Additive Manufacturing Electronics (AME) is a promising method that has the potential to directly embed piezoelectric micromachined ultrasonic transducer (PMUT) probes into conventional electronic circuits and boards. It enables fast customized prototyping, three-dimensional circuit boards, and small-series production. In this study, annular probes composed of circular suspended Aluminum Nitride (AlN)-based PMUT membranes, addressed in 2-dimensional arrays, were designed, fabricated, and encapsulated using AME technology.
2024
Istituto di Nanotecnologia - NANOTEC - Sede Lecce
additive manufacturing electronics
PMUT
aluminum nitride
ultrasonic probes
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/524183
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