Chemical Vapor Deposition of Sb2S3 as Optical Phase Change Material for Photonic Applications

This paper presents experimental results on chemical vapor deposition (CVD) of Sb2S3 films on glass substrates. Large-area uniform amorphous and crystalline films were achieved with low surface roughness. Raman spectroscopy confirmed characteristic vibrational modes in the crystalline films. The thermal and laser amorphous-to crystalline phase transformation was demonstrated. The changes in the optical properties were analyzed using spectroscopic ellipsometry. These findings contribute to the understanding of optical properties of CVD-deposited Sb2S3 films for potential photonic applications such as optical switches and modulators.