The reflecting grating interferometer (RGI) is a folded and reversal wave-front interferometer sensitive only to asymmetrical aberrations such as third-order coma. The RGI can isolate and evaluate coma both in nearly collimated and in noncollimated beams. We propose a RGI with a different optical configuration that includes a lateral shearing in addition to folding and reversal operations. With lateral shear, the RGI also becomes sensitive to other terms of third-order aberrations such as defocusing, astigmatism, and spherical aberration. Optical path difference equations for interpreting interferograms and numerical simulations are presented to show how the interferometer works in the shearing configuration. Its potential applications are described and discussed.

Reflective grating interferometer: a folded reversal and shearing interferometer

2002

Abstract

The reflecting grating interferometer (RGI) is a folded and reversal wave-front interferometer sensitive only to asymmetrical aberrations such as third-order coma. The RGI can isolate and evaluate coma both in nearly collimated and in noncollimated beams. We propose a RGI with a different optical configuration that includes a lateral shearing in addition to folding and reversal operations. With lateral shear, the RGI also becomes sensitive to other terms of third-order aberrations such as defocusing, astigmatism, and spherical aberration. Optical path difference equations for interpreting interferograms and numerical simulations are presented to show how the interferometer works in the shearing configuration. Its potential applications are described and discussed.
2002
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/52474
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