The evolution of Interstitial (I) type defects in Si and its influence on out of equilibrium I super-saturation level is investigated. Two approaches complementary to Quantum Mechanics Calculations (QMC) are applied: the Kinetic Lattice Monte Carlo (KLMC) and the Non-Lattice Kinetic Monte Carlo (NKMC). Our simulations show that the behaviour of I-super-saturation during a far from equilibrium stage is strongly affected by the correspondent aggregate structural evolution. Therefore, even if KLMC and NKMC are based on the same energetics derived by QMC, they give a different prediction of the supersaturation behaviour.

Room temperature point defect migration in crystalline Si

Libertino S;
2002

Abstract

The evolution of Interstitial (I) type defects in Si and its influence on out of equilibrium I super-saturation level is investigated. Two approaches complementary to Quantum Mechanics Calculations (QMC) are applied: the Kinetic Lattice Monte Carlo (KLMC) and the Non-Lattice Kinetic Monte Carlo (NKMC). Our simulations show that the behaviour of I-super-saturation during a far from equilibrium stage is strongly affected by the correspondent aggregate structural evolution. Therefore, even if KLMC and NKMC are based on the same energetics derived by QMC, they give a different prediction of the supersaturation behaviour.
2002
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/52505
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