The energy distributions of positive and negative secondary ion species produced by 5 keV Ne+, Ar+ and O2+ ion bombardment at 30 degrees to polycrystalline aluminium and magnesium targets have been studied. The measurements were carried out in a small solid angle along the surface normal, without extracting ions into the massenergy analyser. The most probable and average energies along with the widths of the distributions were tabulated; essential features of the spectra were interpreted in the terms of a linear collision cascade model with a knock-on contribution. Three energy sub-ranges with appreciable different energy power dependence E vs. s, which could approximate the experimental curves, were revealed for both Al+ and Mg+ atomic ions within a wide energy range. Nearly all the energy spectra of negative secondary ions demonstrated complex structure, with two distinct peaks, caused by impurity species with different binding energies.
Energy distributions of secondary ions sputtered from aluminium and magnesium by Ne+, Ar+ and O2+: a comprehensive study
Daolio S;Pagura C;
2002
Abstract
The energy distributions of positive and negative secondary ion species produced by 5 keV Ne+, Ar+ and O2+ ion bombardment at 30 degrees to polycrystalline aluminium and magnesium targets have been studied. The measurements were carried out in a small solid angle along the surface normal, without extracting ions into the massenergy analyser. The most probable and average energies along with the widths of the distributions were tabulated; essential features of the spectra were interpreted in the terms of a linear collision cascade model with a knock-on contribution. Three energy sub-ranges with appreciable different energy power dependence E vs. s, which could approximate the experimental curves, were revealed for both Al+ and Mg+ atomic ions within a wide energy range. Nearly all the energy spectra of negative secondary ions demonstrated complex structure, with two distinct peaks, caused by impurity species with different binding energies.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
