We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems.
Laser deposition of shape-memory alloy for MEMS applications
Tuissi A;
2003
Abstract
We have coated, by laser deposited NiTi films, Si-based cantilevers, of the kind commercially available as atomic force microscopy probes. The samples exhibited peculiar mechanical features ascribed to combination of shape-memory and bimetal effects. Our findings demonstrate the capabilities of laser deposition in fabricating metal alloys, and, at the same time, open the way to a simple process for the fabrication of basic components in microelectromechanical systems.File in questo prodotto:
Non ci sono file associati a questo prodotto.
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
