In this paper, deep level transient spectroscopy (DLTS) is applied to study the deep levels in tin-doped and highenergy proton irradiated n-type float-zone (FZ) silicon. The results will be compared with irradiated tin-free FZ reference material, in order to evaluate the hardening potential. It will be shown that in Sn-doped silicon (FZ:Sn), a number of additional deep levels can be observed, two of which have been identi.ed as acceptors associated with Sn-V. Furthermore, optically active recombination centres have been probed by photoluminescence (PL) spectroscopy. The PL results con.rm the reduction of electrically active radiation-defect formation in FZ:Sn. At the same time, no Snrelated optically active centres have been found so far.

DLTS and PL studies of proton radiation defects in tin-doped FZ silicon

Privitera V;
2002

Abstract

In this paper, deep level transient spectroscopy (DLTS) is applied to study the deep levels in tin-doped and highenergy proton irradiated n-type float-zone (FZ) silicon. The results will be compared with irradiated tin-free FZ reference material, in order to evaluate the hardening potential. It will be shown that in Sn-doped silicon (FZ:Sn), a number of additional deep levels can be observed, two of which have been identi.ed as acceptors associated with Sn-V. Furthermore, optically active recombination centres have been probed by photoluminescence (PL) spectroscopy. The PL results con.rm the reduction of electrically active radiation-defect formation in FZ:Sn. At the same time, no Snrelated optically active centres have been found so far.
2002
Istituto per la Microelettronica e Microsistemi - IMM
IRRADIATED SILICON; CARBON; GENERATION; OXYGEN; DIVACANCIES; COMPLEX
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/53202
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