This paper gives an overview about the principles and the technologies used in solid-state gas sensors. These devices work by measuring a physical property changed by adsorption/desorption processes and chemical reactions on the surface of a sensing element, i.e. a solid-state film of a gas-sensitive material. Some of the most used types of solid state gas sensors arc: here described together with novel sensor technologies in development for commercial exploitation in the future.

Solid state gas sensors: state of the art and future activities

Forleo A;Francioso L;Rella R;Siciliano P;
2003

Abstract

This paper gives an overview about the principles and the technologies used in solid-state gas sensors. These devices work by measuring a physical property changed by adsorption/desorption processes and chemical reactions on the surface of a sensing element, i.e. a solid-state film of a gas-sensitive material. Some of the most used types of solid state gas sensors arc: here described together with novel sensor technologies in development for commercial exploitation in the future.
2003
Istituto per la Microelettronica e Microsistemi - IMM
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/53230
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