Mesoporous silica thin films have been prepared using a self-assembling process employing cetyltrimethylammonium bromide as the organic template. The films were deposited by dip-coating on silicon and alumina substrates. Thermal treatment at 250º and 450 °C was used to remove the organic template. Fourier transformed infra-red spectra demonstrated that calcination is complete at 450 °C. Electrical measurements under dry and wet conditions were performed for films deposited on alumina substrates with comb-type gold electrodes. The films showed an increase in current intensity as a function of relative humidity. No memory effects were observed after cyclic testing in dry-wet conditions. Electrical characterisation indicates that the mesophase is easily accessible by the external environment.

Electrical and structural characterization of mesoporous silica thin films as humidity sensors

Bearzotti A;
2001

Abstract

Mesoporous silica thin films have been prepared using a self-assembling process employing cetyltrimethylammonium bromide as the organic template. The films were deposited by dip-coating on silicon and alumina substrates. Thermal treatment at 250º and 450 °C was used to remove the organic template. Fourier transformed infra-red spectra demonstrated that calcination is complete at 450 °C. Electrical measurements under dry and wet conditions were performed for films deposited on alumina substrates with comb-type gold electrodes. The films showed an increase in current intensity as a function of relative humidity. No memory effects were observed after cyclic testing in dry-wet conditions. Electrical characterisation indicates that the mesophase is easily accessible by the external environment.
2001
Istituto per la Microelettronica e Microsistemi - IMM
Mesoporoso
Ordinato
Sensore
Umidità
Dispositivo
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/53322
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? 74
social impact