The 3D representation of the DuMond diagram is used to explain the dimensional features of X-ray topographs obtained by multi-crystal configuration with a synchrotron beam. Symmetric Bragg-case reflections are considered for a flat double-crystal monochromator and a flat sample. Two ways of sample alignment are taken into account. They are referred to as C-C and C-? geometries, where the diffraction plane of the sample is parallel and perpendicular, respectively, to the vertical diffraction plane of the monochromator (C polarization). It is shown that the shape of the sample image is closely connected to the shape the diffraction domain common to monochromator and sample assumes in the 3D DuMond diagram. An experiment is reported for the less commonly used C-? topography, showing how the lattice mismatch and its lateral homogeneity are determined in samples made by epilayer and substrate.

3D DuMond diagrams of multi-crystal Bragg-case synchrotron topography. I. Flat sample

Milita S
2001

Abstract

The 3D representation of the DuMond diagram is used to explain the dimensional features of X-ray topographs obtained by multi-crystal configuration with a synchrotron beam. Symmetric Bragg-case reflections are considered for a flat double-crystal monochromator and a flat sample. Two ways of sample alignment are taken into account. They are referred to as C-C and C-? geometries, where the diffraction plane of the sample is parallel and perpendicular, respectively, to the vertical diffraction plane of the monochromator (C polarization). It is shown that the shape of the sample image is closely connected to the shape the diffraction domain common to monochromator and sample assumes in the 3D DuMond diagram. An experiment is reported for the less commonly used C-? topography, showing how the lattice mismatch and its lateral homogeneity are determined in samples made by epilayer and substrate.
2001
Istituto per la Microelettronica e Microsistemi - IMM
Synchrotron topography
Du Mond diagram
Epitaxial layers
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/53331
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