Integrated Magnetometry Platform with Stackable Waveguide-Assisted Detection Channels for Sensing Arrays

The negatively charged nitrogen vacancy (N-V-) center in diamond has shown great success in nanoscale, high-sensitivity magnetometry. Efficient fluorescence detection is crucial for improving the sensitivity. Furthermore, integrated devices enable practicable sensors. Here, we present an integrated architecture which allows us to create N-V- centers a few nanometers below the diamond surface, and at the same time covering the entire mode field of femtosecond-laser-written type-II waveguides. We experimentally verify the coupling efficiency, showcase the detection of magnetic resonance signals through the waveguides and perform proof-of-principle experiments in magnetic field and temperature sensing. The sensing task can be operated via the waveguide without direct light illumination through the sample, which is important for magnetometry in biological systems that are sensitive to light. In the future, our approach will enable the development of two-dimensional sensing arrays facilitating spatially and temporally correlated magnetometry.