Protection of Air-Sensitive Two-Dimensional Van Der Waals Thin Film Materials by Capping and Decapping Process

Two-dimensional (2D) van der Waals materials [1] have been a topic of significant research interest in recent years due to their novel electrical, optical, and mechanical properties. These materials are com- posed of stacked layers held together by van der Waals forces, making them easy to exfoliate, manipulate, and stack. Graphene [2] and transi- tion metal chalcogenides [3] (TMCs) are two prominent examples of 2D van der Waals materials with unexpected properties whose study has led to remarkable breakthroughs and opened new possibilities for advanced technologies.