Flexible Nd3+ doped TeO2–ZnO planar waveguide

Fabrication and characterization of Nd3+-doped TeO2–ZnO planar waveguide deposited on a commercial AS 87 eco SCHOTT glass substrate, a flexible and ultrathin material, using RF magnetron sputtering is presented. The waveguide was evaluated using scanning electron microscopy, atomic force microscopy, m-line spectroscopy, Raman and photoluminescence spectroscopies. Film thickness of 500 ± 10 nm was obtained, with an average surface roughness of 1.2 nm. Attenuation coefficients in the near-infrared and visible regions were measured, and the refractive index was determined to be approximately 2.0 in these spectral regions. The waveguide exhibited attenuation coefficient of 1 dB/cm in the NIR and efficient Nd3+ emission at ∼890 nm, ∼1064 nm, and ∼1350 nm. This study highlights the significant potential of the Nd3+-doped TeO2–ZnO system for advanced flexible optical devices and opens new perspectives for integrated photonics.