Modeling and Simple Parameters Extraction of Calibration Standards for Accurate Mm‐Wave On‐Wafer Measurements up to 110 GHz

In this paper, a simple and novel residual parameter extraction technique is provided for impedance substrate calibration standards. It uses the measured scattering parameters of four calibration standards, that is the THRU, SHORT, OPEN, and LOAD standards, with only the DC resistance known in advance. Based on the electric structures and the frequency range of interest, the equivalent circuit of each standard is provided. The residual parameters in the equivalent circuits might show frequency dependence or frequency non-dependence, which are both considered in the following analysis. In the parameter extraction algorithm, no other calibration is needed. Instead, only the recorded raw data of the four standards are used, by assuming that the two ports of the SHORT, OPEN, and LOAD standards are symmetric and identical. A series of validation experiments are performed on a commercial calibration substrate, within the broad frequency range from 200 MHz to 110 GHz. The results have shown that the extracted residual parameters by using the proposed method are in very good consistency with the values provided by the manufacturer. In addition, the extracted parameters are further used for SOLT calibration, by measuring another group of calibration standards on the commercial calibration substrate. The calibration accuracy and reliability are further verified by using another open structure, a transmission line, and a mismatched load.