We present the design and fabrication of a chemoresistive sensor array for the volatile organic compounds and gas detection. Different nanofibrous conductive polymers, produced by electrospinning technique, have been used as chemical interactive materials. Sensor array was integrated with read-out electronic circuits on flexible substrate. In order to obtain high electrical performances maintaining integration capability, on plastic materials, respect to standard c-Si CMOS technology, polycrystalline silicon thin film transistor based circuitry has been used. The performances of the fabricated sensor array have been tested with different concentrations of Methanol, Lactic acid and Ammonia.

Chemoresistive nanofibrous sensor array and read-out electronics on flexible substrate

L Maiolo;E Zampetti;A Valletta;F Maita;D Simeone;M Cuscunà;A Bearzotti;L Mariucci;
2009

Abstract

We present the design and fabrication of a chemoresistive sensor array for the volatile organic compounds and gas detection. Different nanofibrous conductive polymers, produced by electrospinning technique, have been used as chemical interactive materials. Sensor array was integrated with read-out electronic circuits on flexible substrate. In order to obtain high electrical performances maintaining integration capability, on plastic materials, respect to standard c-Si CMOS technology, polycrystalline silicon thin film transistor based circuitry has been used. The performances of the fabricated sensor array have been tested with different concentrations of Methanol, Lactic acid and Ammonia.
2009
Istituto per la Microelettronica e Microsistemi - IMM
978-1-4244-4190-7
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.14243/6118
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